Design of two layer clamped-clamped microsensor based on classical and non-classical theories

Document Type : Research Article

Authors

Faculty of Mechanical and Energy Engineering, Shahid Beheshti University, Tehran, Iran,

Abstract

In this paper, the two-layer micro sensor is modeled as a two-layer clamped-clamped microbeam and it is optimized by using the genetic algorithm. Using the results of this research, clamped-clamped microbeams can be designed in such a way that the performance of microsensors whose structure includes these microbeams will be improved. The quality factor, the sensitivity, and the maximum stress are selected as objective functions. The sensitivity and the quality factor are the functions of the natural frequency. The natural frequency is calculated based on Rayleigh’s method. The quality factor is calculated by approximation established on the one layer’s quality factor formula. To calculate the maximum stress, the system is assumed as a mass-spring system that has a harmonic displacement and the maximum deflection is the static deflection. The thickness of each layer, the width of the microbeam, and the length of the microbeam are selected as design variables. The optimization is done based on classical and non-classical theory by the genetic algorithm. The results based on both theories are approximately equal. The length of the microbeam is the most important variable and very changes (approximately 190%). The thickness of the silicon layer has the least effect on the results and changes just lower than  (approximately 20%). The results show that when the maximum stress decreases and the sensitivity increases, the quality factor decreases which is undesirable. Maximum sensitivity is obtained when the microbeam is very small.

Keywords

Main Subjects

References

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AUT Journal of Mechanical Engineering
Volume 9, Issue 1
2025
Pages 19-32

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