Investigation of Laser Induced Plasma Assisted Ablation of Glass in Presence of Magnetic Field

Document Type : Research Article

Authors

1 Department of Mechanical Engineering, Amirkabir University of Technology, Tehran, Iran

2 Department of Physics and Energy Engineering, Amirkabir University of Technology, Tehran, Iran

Abstract

The present paper is devoted to the study of glass ablation with laser-induced plasma and the effect of the magnetic field on this process. In the experiments, a nanosecond pulsed laser with a wavelength of 532 nm and copper with 2 mm thickness is used as the laser source and the metal substrate respectively. Two permanent neodymium magnets (4500-4800 G) are used to apply an external magnetic field to the drilling zone and to make ablation on the laboratory slide glass. The laser fluence is selected in 4 levels of 1, 1.5, 3, and 3.5  and the characteristics of the holes made with 50 pulse laser radiation are compared in terms of dimensions and morphology. It is observed that by applying a magnetic field, the removed material volume increases about 2 to 2.4 times in the lower fluences and 31 to 35 times in the higher fluences. In the magnetic field absence, for different levels of laser fluence, depth and diameter are changed from 1.6 to 32 and 10 to 100 microns. However, in its presence, they are changed from 3 to 76 and 11 to 380 microns respectively. The shape of deposited particles on glass is also different in the presence and absence of a magnetic field.

Keywords

Main Subjects

References

[1] M. Kirchhoff, M. Ilg, D. Cote, Application of borophosphosilicate glass (BPSG) in microelectronic processing, Berichte der Bunsengesellschaft für physikalische Chemie, 100(9) (1996) 1434-1437.
[2] K. Li, G. Xu, X. Huang, Z. Xie, F. Gong, Temperature effect on the deformation and optical quality of moulded glass lenses in precision glass moulding, International Journal of Applied Glass Science, 11(1) (2020) 185-194.
[3] Y. Suzuka, M. Ota, Optical device, optical device controller, and method for manufacturing optical device, in, Google Patents, 2020.
[4] A. Crespi, R. Osellame, F. Bragheri, Femtosecond-laser-written optofluidics in alumino-borosilicate glass, Optical Materials: X, 4 (2019) 100042.
[5] E.S. Hamilton, A.R. Hawkins, Direct macro-to-micro interface method for microfluidics, Journal of Micromechanics and Microengineering, 30(5) (2020) 057001.
[6] Y. Liu, A. Hansen, R.K. Shaha, C. Frick, J. Oakey, Bench scale glass-to-glass bonding for microfluidic prototyping, Microsystem Technologies,  (2020) 1-9.
[7] G.C. Rezende, S. Le Calvé, J.J. Brandner, D. Newport, Micro photoionization detectors, Sensors and Actuators B: Chemical, 287 (2019) 86-94.
[8] R. Tölke, A. Bieberle-Hütter, A. Evans, J. Rupp, L. Gauckler, Processing of Foturan® glass ceramic substrates for micro-solid oxide fuel cells, Journal of the European Ceramic Society, 32(12) (2012) 3229-3238
[9] M. Rich, O. Mohd, F.S. Ligler, G.M. Walker, Characterization of glass frit capillary pumps for microfluidic devices, Microfluidics and Nanofluidics, 23(5) (2019) 1-9.
[10] J. Hwang, Y.H. Cho, M.S. Park, B.H. Kim, Microchannel fabrication on glass materials for microfluidic devices, International Journal of Precision Engineering and Manufacturing, 20(3) (2019) 479-495.
[11] S. Kumar, A. Dvivedi, Effect of tool materials on performance of rotary tool micro-USM process during fabrication of microchannels, Journal of the Brazilian Society of Mechanical Sciences and Engineering, 41(10) (2019) 1-16.
[12] M.S. Cheema, A. Dvivedi, A.K. Sharma, Tool wear studies in fabrication of microchannels in ultrasonic micromachining, Ultrasonics, 57 (2015) 57-64
[13] M. Azmir, A. Ahsan, A study of abrasive water jet machining process on glass/epoxy composite laminate, Journal of Materials Processing Technology, 209(20) (2009) 6168-6173.
[14] F. Mehrabi, M. Farahnakian, S. Elhami, M. Razfar, Application of electrolyte injection to the electro-chemical discharge machining (ECDM) on the optical glass, Journal of Materials Processing Technology, 255 (2018) 665-672.
[15] A. Behroozfar, M.R. Razfar, Experimental and numerical study of material removal in electrochemical discharge machining (ECDM), Materials and Manufacturing Processes, 31(4) (2016) 495-503.
[16] M. Hajian, M.R. Razfar, S. Movahed, An experimental study on the effect of magnetic field orientations and electrolyte concentrations on ECDM milling performance of glass, Precision Engineering, 45 (2016) 322-331.
[17] J. Arab, H.S. Chauhan, P. Dixit, Electrochemical discharge machining of soda lime glass for MEMS applications, International Journal of Precision Technology, 8(2-4) (2019) 220-236.
[18] L. Zhang, W. Wang, X.-J. Ju, R. Xie, Z. Liu, L.-Y. Chu, Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching, RSC Advances, 5(8) (2015) 5638-5646.
[19] S. Das, V.C. Srivastava, Microfluidic-based photocatalytic microreactor for environmental application: a review of fabrication substrates and techniques, and operating parameters, Photochemical & Photobiological Sciences, 15(6) (2016) 714-730.
[20] U. Sarma, S.N. Joshi, Effect of Laser Parameters on Laser-Induced Plasma-Assisted Ablation (LIPAA) of Glass, in:  Advances in Unconventional Machining and Composites, Springer, 2020, pp. 67-76.
[21] M. Ghoreishi, D. Low, L. Li, Comparative statistical analysis of hole taper and circularity in laser percussion drilling, International Journal of Machine Tools and Manufacture, 42(9) (2002) 985-995.
[22] E. Golchin, M. Moradi, S. Shamsaei, Laser drilling simulation of glass by using finite element method and selecting the suitable Gaussian distribution, in:  Modares Mechanical Engineering, Proceedings of the Advanced Machining and Machine Tools Conference, 2015, pp. 416-420
[23] J. Zhang, K. Sugioka, K. Midorikawa, Micromachining of glass materials by laser-induced plasma-assisted ablation (LIPAA) using a conventional nanosecond laser, in:  Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, International Society for Optics and Photonics, 1999, pp. 363-369.
[24] G. Kibria, B. Bhattacharyya, J.P. Davim, Non-traditional micromachining processes, Springer, 2017.
[25] J. Zhang, K. Sugioka, K. Midorikawa, Microprocessing of glass materials by laser-induced plasma-assisted ablation using nanosecond pulsed lasers, in:  Laser Applications in Microelectronic and Optoelectronic Manufacturing V, International Society for Optics and Photonics, 2000, pp. 332-337.
[26] V.M. Kadan, I.V. Blonsky, V.O. Salnikov, E.V. Orieshko, Effects of laser-induced plasma in machining of transparent materials, in:  Micromachining and Microfabrication Process Technology X, International Society for Optics and Photonics, 2005, pp. 130-137
[27] Y. Hanada, K. Sugioka, Y. Gomi, H. Yamaoka, O. Otsuki, I. Miyamoto, K. Midorikawa, Development of practical system for laser-induced plasma-assisted ablation (LIPAA) for micromachining of glass materials, Applied Physics A, 79(4) (2004) 1001-1003.
[28] Y. Hanada, K. Sugioka, H. Takase, H. Takai, I. Miyamoto, K. Midorikawa, Selective metallization of polyimide by laser-induced plasma-assisted ablation (LIPAA), Applied Physics A, 80(1) (2005) 111-115.
[29] Y. Hanada, K. Sugioka, K. Midorikawa, Laser-induced plasma-assisted ablation (LIPAA): fundamental and industrial applications, in:  High-Power Laser Ablation VI, International Society for Optics and Photonics, 2006, pp. 626111.
[30] S. Xu, B. Liu, C. Pan, L. Ren, B. Tang, Q. Hu, L. Jiang, Ultrafast fabrication of micro-channels and graphite patterns on glass by nanosecond laser-induced plasma-assisted ablation (LIPAA) for electrofluidic devices, Journal of Materials Processing Technology, 247 (2017) 204-213.
[31] T. Rahman, Z. Rehman, S. Ullah, H. Qayyum, B. Shafique, R. Ali, U. Liaqat, A. Dogar, A. Qayyum, Laser-induced plasma-assisted ablation (LIPAA) of glass: Effects of the laser fluence on plasma parameters and crater morphology, Optics & Laser Technology, 120 (2019) 105768.
[32] Y. Zhao, Q. Li, Z. Wang, Z. Dai, T. Chen, Microchannel fabrication in fused quartz by backside laser-induced plasma ablation using 248 nm KrF excimer laser, Applied Sciences, 9(24) (2019) 5320.
[33] N.B. Dahotre, S. Harimkar, Laser fabrication and machining of materials, Springer Science & Business Media, 2008.
[34] B. Wu, S. Tao, S. Lei, The interactions of microhole sidewall with plasma induced by femtosecond laser ablation in high-aspect-ratio microholes, Journal of manufacturing science and engineering, 134(1) (2012).
[35] S. Harilal, M. Tillack, B. O’shay, C. Bindhu, F. Najmabadi, Confinement and dynamics of laser-produced plasma expanding across a transverse magnetic field, Physical Review E, 69(2) (2004) 026413.
[36] K. Kondo, T. Kanesue, J. Tamura, R. Dabrowski, M. Okamura, Laser plasma in a magnetic field, Review of Scientific Instruments, 81(2) (2010) 02B716.
[37] C. Pagano, J. Lunney, Lateral confinement of laser ablation plasma in magnetic field, Journal of Physics D: Applied Physics, 43(30) (2010) 305202.
[38] k.S. Lash, R. Gilgenbach, C. Ching, Laser‐ablation‐assisted‐plasma discharges of aluminum in a transverse‐magnetic field, Applied physics letters, 65(5) (1994) 531-533.
[39] C. Ye, G.J. Cheng, S. Tao, B. Wu, Magnetic field effects on laser drilling, Journal of Manufacturing Science and Engineering, 135(6) (2013).
[40] Y.-J. Chang, C.-L. Kuo, N.-Y. Wang, Magnetic Assisted Laser Micromachining for Highly Reflective Metals, Journal of Laser Micro/nanoengineering, 7(3) (2012).
[41] S. Wolff, I. Saxena, A preliminary study on the effect of external magnetic fields on laser-induced plasma micromachining (LIPMM), Manufacturing Letters, 2(2) (2014) 54-59.
[42] R. Fabbro, J. Fournier, P. Ballard, D. Devaux, J. Virmont, Physical study of laser‐produced plasma in confined geometry, Journal of applied physics, 68(2) (1990) 775-784.
[43] K.A. Pathak, A.J. Chandy, Laser ablated carbon plume flow dynamics under magnetic field, Journal of Applied Physics, 105(8) (2009) 084909.
[44] Y.T. Lee, R. More, An electron conductivity model for dense plasmas, The Physics of fluids, 27(5) (1984) 1273-1286.
[45] S. Elhami, M. Razfar, Study of the current signal and material removal during ultrasonic-assisted electrochemical discharge machining, The International Journal of Advanced Manufacturing Technology, 92(5) (2017) 1591-1599.
AUT Journal of Mechanical Engineering
Volume 6, Issue 3
September 2022
Pages 401-414

Files

Share

How to cite

Statistics